发明名称 BLOCK REPLICATOR OF ION IMPLANTATION BUBBLE DEVICE
摘要 PURPOSE:To attain a stably operating block replicator, by providing a hairpin- shaped conductor pattern over a cusp of a major line from a cusp of a minor loop on the line connecting the cusp of the major line and the cusp of the minor loop. CONSTITUTION:A conductor pattern 12 is formed into a hairpin shape over a a cusp 10a of the major line from a cusp 11a of the minor loop. When a bubble 14 is transferred to the cusp 10a of a minor loop 11 as shown in Fig. (a), a pulse I1 is impressed to the conductor pattern 12 in the direction where the bubble is striped. Thus, the bubble 14 is expanded on the inside of the hairpin- shaped conductor pattern 12 over the cusp 10a of the major line as shown in Fig. (b). Next, when a pulse I2 having an opposite polarity is impressed, the bubble is cut into bubbles 14' and 14'' in a non-implantation area between cusps 10a and 10b of major lines as shown in Fig. (c). Consequently, the bubble is not trapped halfway.
申请公布号 JPS59113587(A) 申请公布日期 1984.06.30
申请号 JP19820223043 申请日期 1982.12.21
申请人 FUJITSU KK 发明人 MATSUDA KAZUO;OOHASHI MAKOTO;SATOU YOSHIO;MIYASHITA TSUTOMU;BETSUI KEIICHI
分类号 G11C11/14;G11C19/08 主分类号 G11C11/14
代理机构 代理人
主权项
地址