REACTIVE ION ETCHING METHOD,申请号JP19820222347-传众专利搜索

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发明名称	REACTIVE ION ETCHING METHOD
摘要
申请公布号	JPS59113183(A)	申请公布日期	1984.06.29
申请号	JP19820222347	申请日期	1982.12.17
申请人	MATSUSHITA DENKI SANGYO KK	发明人	ISHIDA TOSHIMICHI;TANNO MASUO
分类号	C09K13/00;C23F1/00;C23F4/00;H01L21/306	主分类号	C09K13/00
代理机构		代理人
主权项
地址

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