| 摘要 |
The loading station (1) serves for charging a tube furnace (10), in particular for semi-conductor technology, the heating tubes (9) of which are arranged parallel to one another and essentially one above another. The loading station (1) has, in front of the tube openings, a loading space (2), the delimiting surfaces of which are formed at least by a rear wall (3), a top wall (4) and a bottom wall (5). Also provided in the loading space (2) is in each case a charging arrangement (11) for each heating tube (9), which arrangement comprises a support arm (12) which projects into the loading space (2) and is guided parallel to the axis of the heating tube (9) to be charged, a clamping head (13) connected thereto and a drive (20) which displaces the support arm (12) in the axial direction of the heating tube (9). Lastly, the loading station (1) has a blowing arrangement which produces a laminar flow of filtered air which passes through the rear wall (3) and the loading space (2) approximately horizontally from the rear to the front. The charging arrangements (11) project from the top wall (4) and/or bottom wall (5) into the loading space (2), the support arms (12) running in the plane of the clamping heads (13) or in the flow direction behind the clamping heads (13). The drives (20) of the charging arrangements (11) are arranged outside the loading space (2). <IMAGE>
|
