| 摘要 |
PURPOSE:To enhance speed and sensitivity as well as humidity resistance and durability, and adaptability for use in a laser printer by using a-Si.Ge having photosensitivity throughout from the visible red to the near IR region for a part of a photosensitive layer. CONSTITUTION:The first a-Si:H:F type layer 2, the second a-Si.Ge layer 3, and the third a-Si:H:F layer 4 are successively laminated on the conductive substrate 1 of an electrophotographic sensitive body. The first layer contains 5-40 atomic % sum of F and H (F>H), and 10<-4>-5X10<-2> atomic % O and >=10<11>OMEGA.cm(rho) as well as good dark resistance and photocarrier mobility. The second layer 3 has SiH4/GeH4=6/4-9.5/0.5, and 10-40 atomic % content of H, and high sensitivity throughout from the visible red to the near IR region as well as good dark resistance. The third layer 4 contains 5-40 atomic % sum of F and H, (F>H) and 10<-3>-10<-2> atomic % O, and >=5X10<12>OMEGA.cm rho, and compensates the low resistance of the second layer 3. As a result, speed and sensitivity are enhanced, and adaptability for use in a laser printer is obtained. |
