| 摘要 |
PURPOSE:To improve X-ray generating efficiency and to obtain a highly reliable X-ray generator requiring no mechanical valve, by providing focus and shrinking performances independently in one X-ray generating chamber. CONSTITUTION:First electrode 3 composed of cylindrical stainless steels is provided on an insulation substrate 2 made of ceramic in X-ray generating chamber 1 having interior formed of hollow tubular stainless steel. Then second electrode 4 having central axis same with that of first electrode 3 where the interior is composed of hollow tubular stainless steel is provided around first electrode 3. Then plasma producing gas is led into X-ray generating chamber and high voltage is applied across first and the second electrodes 3, 4 while high voltage is also across first and the third electrodes 3, 5 to shrink plasma. Since functions are shared in same X-ray generating chamber, production and shrinkage of plasma can be performed independently under optimum condition resulting in improvement of X-ray production efficiency. |
