| 摘要 |
PURPOSE:To manufacture silicon nitride powder sinterable to high degree by heating a mixture of a silane compound contg. nitrogen with an auxiliary sintering agent in a nonoxidative atmosphere. CONSTITUTION:Silicon diimide and/or a thermally decomposed product thereof is used as a silane compound contg. nitrogen. The compound is used in an amorphous state. An auxiliary sintering agent is selected from a group consisting of oxides such as Y2O3, Al2O3 and MgO, carbonates, oxalates and other salts each convertible into oxide by heating, and nonoxidized compounds such as AlN and TiC. The silane compound is uniformly mixed with the auxiliary sintering agent in a ball mill or the like, and the mixture is heated at 1,200-1,700 deg.C in a nonoxidative atmosphere to manufacture silicon nitride powder sinterable to high degree. A sintered body obtd. by sintering the silicon nitride powder has superior characteristics at high temp. |
