| 摘要 |
PURPOSE:To remove the generation of a shading of a transfer pattern, etc. by moving two mirrors and preventing the movement of the position of an apparent radiation source when radiation from a radiation source is received by these mirrors in succession and the radiation is utilized for a body to be irradiated. CONSTITUTION:The main rays of SOR beams generated from a light source 1 are projected vertically to a mask 2 under the state in which the two mirrors 4, 5 are positioned at the positions of solid lines. An apparent light source generated regarding the mirror 4 at that time is positioned at VS-1, and an apparent light source generated regarding the mirror 5 is positioned at VS-2. When the position of the mirror 4 is turned to the position of a dotted line, the apparent light source VS-1 is moved to VS-1'. The position of the mirror 5 is moved on a perpendicular bisector (L) of a straight line tying the apparent light source VS-1' and the apparent light source VS-2 and to a position where an apparent light-source position is at the VS-2 with the movement of the apparent light source VS-1. Accordingly, the position of the apparent light source VS-2 for SOR beams irradiated to the mask 2 does not change even when the mirrors 5, 4 are moved as mentioned above. |
