发明名称 STRIPPING METHOD OF PHOTORESIST
摘要 PURPOSE:To easily strip off an acrylic type photoresist from a metallic surface without using any solvent by rapidly cooling said resist bonded to the metallic surface in a cooling medium kept at a specified temp. CONSTITUTION:An acrylic type photoresist bonded integrally to a metallic surface is subjected to necessary exposure, development, and etching processes especially in a circuit board to form a circuit, and it is rapidly cooled to <=0 deg.C, preferably in a -20 deg.C--200 deg.C cooling medium. The medium may be liquid and it can be selected optionally, e.g. from liquefied nitrogen, liquefied CO2, a dry ice-methanol mixed system, and an atm. cooled with said medium, etc. After treatment with such a cooling medium, the photoresist sticking to the metallic surface can be removed perfectly by sucking it with a vacuum suction machine like an electric cleaner when needed, or blowing it off with compressed air, or using the like auxiliary means.
申请公布号 JPS59107354(A) 申请公布日期 1984.06.21
申请号 JP19820217621 申请日期 1982.12.11
申请人 NITTO DENKI KOGYO KK 发明人 YOKOTA KOUJI;OKA TADAOKI;SONODA SANENOBU;FUJINAWA MASAHIRO;MIZUTANI KAZUNORI
分类号 H05K3/06;G03F7/42 主分类号 H05K3/06
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