Vacuum evaporating apparatus utilizing multiple rotatable cans

摘要

An apparatus for vacuum evaporating magnetic material onto a base. Cylindrical cans are disposed parallel to one another and rotated either in the same or opposite directions. A tape-shaped base is wound around the cans passing from an upper vacuum chamber to a lower vacuum chamber. A vacuum evaporation source is positioned in the lower chamber and directed to the tape-shaped base in a predetermined area on both sides of a gap between the cans or a line contact area between the cans.