发明名称 |
APARELHO PARA A MANUFATURA DE DISPOSITIVOS FOTOVOLTAICOS E CONJUNTO PARA DEPOSITAR UM MATERIAL SOBRE UM SUBSTRATO A PARTIR DE UM PLASMA EXCITADO POR ENERGIA DE MICROONDAS |
摘要 |
<p>Disclosed is an apparatus and assembly (50) for manufacturing photovoltaic devices of the type including a plurality of layers of semiconductor materials by depositing the materials onto a substrate (11) from a microwave energy excited plasma. The asembly includes a deposition chamber (30) a source of microwave energy, and an antenna (64) extending into the chamber (30) and coupled to the microwave energy source. The antenna (64) includes an outer sheath formed from a conductive material, an inner conductor extending within and electrically insulated from the outer sheath, and a slot within the outer sheath. The assembly also includes a new and improved feed-through (130) for the antenna permitting the antenna to extend into the chamber while establishing a vacuum seal between the chamber and the antenna. …<??>The apparatus includes a plurality of deposition chambers each chamber arranged to deposit a respective one of the layers of semiconductor materials onto the substrate as the substrate is advanced therethrough. At least one of the deposition chambers is arranged as above.</p> |
申请公布号 |
BR8306207(A) |
申请公布日期 |
1984.06.19 |
申请号 |
BR19838306207 |
申请日期 |
1983.11.11 |
申请人 |
ENERGY CONVERSION DEVICES,INC. |
发明人 |
EUGENE FOURNIER;JOACHIM DOEHLER |
分类号 |
H01L31/04;C23C16/511;H01J37/32;H01L21/205;H01L31/20;(IPC1-7):H01L45/00;H01L31/06 |
主分类号 |
H01L31/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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