| 摘要 |
PURPOSE:To provide a multi-layered Fe-Cu film having uniaxial magnetic anisotropy, low coercive force and high magnetic permeability by alternately laminating Fe and Cu films having specific thicknesses. CONSTITUTION:The multi-layered Fe-Cu film is formed by alternately laminating the Fe and Cu films having <=500Angstrom thickness. A magnetron sputtering method is used to manufacture the multi-layered Fe-Cu film. The substrate temp. is decreased to decrease the energy of the diffusion sputtering atoms at the boundary face parts of the multi-layered film and to decrease the effect of implantation, by which the boundary faces are stabilized and the uniaxial anisotropy is generated. The lower coercive force is obtd. by decreasing a sputtering grade. |
