| 摘要 |
PURPOSE:To adjust automatically a scan plane and a sample surface in parallel, by providing a piezoelectric transducer for position detection so as to surround a piezoelectric transducer and detecting the time difference of sample reflected waves and displacing a sample placing face on a basis of this time difference. CONSTITUTION:An ultrahigh-frequency burst wave electric signal is supplied to a piezoelectric transducer 22 for information detection of an ultrasonic transmitting and receiving part from a high frequency pulse generator 2 through a cir culator 3 under the control of a control part 1, and a sample placed on a sample table 31 is scanned with an ultrasonic spot, and reflected waves are processed to display an ultrasonic image on a display part 13. The burst wave signal from the high frequency pulse generator 2 is supplied to piezoelectric transducers 22a-23d for position detection through a circulator to project ultrasonic waves to the sample, and the difference of reception time of sample reflected waves among transducers 23a, 23b, 23c, and 23d is detected, and X and Y-direction adjusting motors 33 and 34 of a goniometer 32 are driven to displace the sample table 31, thereby adjusting the scan plane and the sample surface in parallel automatically. |
