| 摘要 |
PURPOSE:To improve the film thickness accuracy of a magnetic core and a magnetic gap by providing an inorganic insulated film layer having a low etching speed between two magnetic film layers constituting a magnetic core and preventing the reduction of thickness of the magnetic film at the area of the magnetic gap. CONSTITUTION:A ''Permalloy'' film is stacked by a sputtering process, and a pattern is formed by a dry etching process. Thus a magnetic film 17 is obtained. The film 17 covers a magnetic gap part A and is connected to the rear part 20 of the 1st magnetic core. An inorganic insulated film 18 is formed on the film 17. The material used for the film 18 is most suitably an oxide like alumina, titania, etc., i.e., a stable compound that has a low speed with a dry etching process. Then the ''Permalloy'' film is sputtered and positioned at a place apart from the counter surface of a medium by a prescribed distance. Thus a magnetic film 19 is formed through a dry etching process. In this case, the film 18 serves as an etching stopper of the film 19. The thickness of the film 18 requires such value that can absorbe the variance produced at the etching end point of the film 19. |
