| 摘要 |
PURPOSE:To improve the reliability of a semiconductor integrated circuit by forming a protecting film layer after a fuse is molten. CONSTITUTION:In a semiconductor fuse having a fuse element 301, a wiring unit 302, an insulating film 303 and a protecting film layer 304, the protecting film layer is not formed in the step of melting a fuse, but a final product is formed through the step of forming a protecting film layer after the fuse is molten. Since the film 304 is formed after the fuse 301 is molten, the part which is broken at the fuse melting time is covered with the protecting film, thereby preventing impurities from entering. Accordingly, the erroneous operation of the circuit element can be prevented, thereby improving the reliability. |
