| 摘要 |
PURPOSE:To simplify a structure and to facilitate processing and assembling, by equalizing the flexural rigidity of the vibration piece of a tuning fork type vibrator in a main vibration direction and that in a detecting direction. CONSTITUTION:An alternating current is made to flow to coils 36a, 36b, 37a, 37b to vibrate vibration pieces 4, 5 and flat plate parts 34, 35 in an X-direction. If the arrangement of magnetic field generating parts 40a, 40b is changed so that line of magnetic induction obliquely traverses the coils 36a, 36b, 37a, 37b, the detection of excitation at least in one direction of both x- and y-directions or the vibration of the flat plate parts at least in one direction of both x- and y-directions can be performed. The cross-sectional shape of each of the vibration pieces 4, 5 is formed in an arbitrary shape almost equalizing flexural rigidity in x- and y-directions in addition to a square shape. Because each of the vibration pieces 4, 5 and the flat plate parts 34, 35 can be manufactured from one silicon monocrystal substrate by two-dimensional cutting processing, manufacturing becomes easy. |
