发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要 PURPOSE:To microminiaturize an element by accelerating and restricting the decrease in the short channel effect and the withstand voltage of a punch through by decreasing the resistance of source and drain regions. CONSTITUTION:The second conductive type semiconductor layer 10 and source 13 and drain region 14 formed of inter-gold layer semiconductor compound film on the layer 10 are formed in space on a plurality of insular region surfaces which are isolated via the element isolating region 3 of the first conductive semiconductor substrate 1, a gate insulating film 15 is formed between the source and drain regions on the substrate, and a gate electrode 17 is formed on the film 15.
申请公布号 JPS59104169(A) 申请公布日期 1984.06.15
申请号 JP19820213589 申请日期 1982.12.06
申请人 TOSHIBA KK 发明人 KAGAMI SHIYOUICHI
分类号 H01L29/78;(IPC1-7):01L29/78 主分类号 H01L29/78
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