| 摘要 |
PURPOSE:To prevent destruction of sample gas by glow discharge by holding a pipe for sending ionized gas to the ion source etc. at a high voltage. CONSTITUTION:The ionized gas is sent to a high voltage part 1 such as ion source from a gas supply source 3 through a pipe 4 under a gas pressure of about 10<-2>Torr to several Torr. A conductive member 6 is attached to the circumference between the collar 4a and high voltage part 1 among the pipe 4 and this part is held at a high voltage. At this time, since a voltage gradient is not generated at the arer surrounded by said member, the glow discharge is not generated in this region and the sample gas is not destroyed by the discharge. Accordingly, analysing accuracy of mass analyzer can be improved remarkably. |
