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发明名称
FOCUSING METHOD FOR ELECTRON MICROSCOPE OR THE LIKE
摘要
申请公布号
JPS59103257(A)
申请公布日期
1984.06.14
申请号
JP19820214370
申请日期
1982.12.06
申请人
NIPPON DENSHI KK
发明人
SUZUKI KEISUKE
分类号
H01J37/21;(IPC1-7):01J37/21
主分类号
H01J37/21
代理机构
代理人
主权项
地址
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