| 摘要 |
PURPOSE:To eliminate hysteresis and improve linearity and stabilize the operation of an actuator by a method wherein lamination ratios of piezoelectric elements of the respective units in the actuator are made to be multiples of two and a plurality of such units are laminated in series. CONSTITUTION:Lamination ratios of piezoelectric elements A of the respective units 11, 12, 13... in the actuator 10 of a laminated piezoelectric actuator are made to be multiples of two and adjoining units 11, 12, 13... are made to adhere to each other. A bit driving circuit 20 composed of a plurality of switches 21, 22, 23... which correspond to the respective units 11, 12, 13... is provided to turn ON and OFF DC voltages applied to the piezoelectric elements A of the respective units 11, 12, 13.... Input signals are converted into digital signals by an A/D converter 30 and bit signals BS are applied to the respective switches 21, 22, 23.... With this constitution, hysteresis created in the actuator 10 can be eliminated and the linearity of the operation of the actuator 10 can be improved. |
