| 摘要 |
PURPOSE:To obtain a wire bonding device having high reliability by providing a rotatable sample table, a position detecting device, 180 deg. rotation control device, calculating devices and a coordinates control mechanism, thereby preventing a slip of positioning. CONSTITUTION:After the reticule 21a of a TV 21 is set to be accordant with a point (a) on a sample 11 placed on a rotatable table 12 with being slipped out of the center of rotation by DELTAx, DELTAy, a switch 23 is closed and the coordinates are read by an electric manipulator 24. Next, said table is rotated by 180 deg. and the point (a) and the reticule 21a are brought to be accordant again and the coordinates are read into similarly. Next, coordinates are sent to a control device 22 where x/2, y/2 is calculated and motors 20a and 20 are driven to make a center of rotation of the sample 11 and the center of the reticule 21a i.e. the axial center of a wedge 15 accordant. This constitution offers the bonding device without a slip of positioning in process of bonding. |
