Art of controlling sputtering and metal evaporation by means of a plane acceptor,申请号US19640352417-传众专利搜索

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发明名称	Art of controlling sputtering and metal evaporation by means of a plane acceptor
摘要
申请公布号	US3344054(A)	申请公布日期	1967.09.26
申请号	US19640352417	申请日期	1964.03.02
申请人	G. T. SCHJELDAHL COMPANY	发明人	LAEGREID NILS;MOSESON ROGER M.
分类号	C23C14/54;H01J37/34	主分类号	C23C14/54
代理机构		代理人
主权项
地址

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