| 摘要 |
PURPOSE:To facilitate the preservation of a pattern, by using a reduced pattern as a reference pattern, expanding the pattern, and comparing the pattern with a pattern to be inspected. CONSTITUTION:An optical system, which detects a pattern, is composed of the following parts: XY tables 22 and 23, which set a reference body 24 and an object to be inspected 25; X step motor 18 and 19, which move the XY tables 22 and 23 in the direction X; Y step motors 20 and 21, which move the table in the direction Y; transmitted light beams 1 and 2, which are projected on the patterns; objective lenses 26 and 27, which form the images of the patterns; and linear image sensors 10 and 11, which converts the true objects into image signals. A pattern data extracting part extracts the defect from the patterns and comprises a pattern comparing circuit 14 and a defect judging circuit 28. A control part is composed of a setting board 30 and a control mechanism 29. |
