| 摘要 |
PURPOSE:To make the detection of the titled detector highly precise meeting the requirements for performance by a method wherein a mode to measure the location of one pattern is selctively transferred to another mode to measure the locations of multiple patterns. CONSTITUTION:Two marks are provided on the two positions separated at specified distance on an object to be detected and in the first measurement, one mark is brought within the range of television to detect the location thereof. Next a wafer stage 5 is shifted by specified amount of XT in the direction of X bringing the other mark within the range of television to detect the location thereof. A microcomputer may form a judgement to detect one mark only or both marks. |
