| 摘要 |
PURPOSE:To make a transfer apparatus compact, by performing the wafer transfer work between a carrier and boat by a belt conveying system. CONSTITUTION:An endless conveying mechanism 5 is provided between an elevator, wherein mounting stages of a carrier 3 having a plurality of wafer containing stages that are arranged in parallel are sent in a pitched mode, and an elevator, wherein a boat 4 having a plurality of accommodating grooves that are provided in parallel is sent in a pitched mode. When wafers 2 are transferred to the boat 4 from the carrier 3, a slant angle theta of the boat 4 with respect to the vertical direction is set at the minimum angle so that the wafers 2 do not fall out of the accommodating grooves of the boat 4. When the boat 4 is exchanged after the transfer is finished, the slant angle of the boat 4 is made large. |
