MEASURING DEVICE OF SURFACE HEIGHT OF BODY

摘要

PURPOSE:To expand the measurement range of the surface height of a body by irradiating the surface of the body with light at a specific angle and forming a light and dark image, and converging its reflected light for image formation on a semiconductor array and finding the distance from the reference position of the light and dark image. CONSTITUTION:The light emitted from a light source 1 is made incident to the surface of a material 2 to be exposed through a slit plate 3' and a lens 4 at the specific angle to form the light and dark image. Its reflected light is expanded by an image forming lens 5 to form an image on the semiconductor array sensor 13. Its output is sent to an arithmetic circuit 15 through an amplifier 14 to find the surface height of the material on the basis of the distance from the reference position of the light and dark image, and the height is displayed on a display device 16 and also sent as a control signal to an amplifier and the deflector 11 of an electron gun 8. The image forming light of slanting incidence is used, so the measurement range of the surface height is expanded.