| 摘要 |
PURPOSE:To enable to circulate low pressure gas in an enclosed vessel of circular shape by respectively providing a fan of a blower and a vacuum pump in and out of the vessel, and connecting a vacuum pump intake conduit to the vessel and the rotational shaft bearing of the fan. CONSTITUTION:This gas circulating device has an enclosed vessel 1, a fan 3 of a blower, a motor 5 for rotatably driving the fan 3, a transmission shaft 7 for coupling the fan 3 to the motor 5, a vacuum pump 9, an exhaust conduit 11 for coupling the vessel 1 to the pump 9, and an exhaust conduit 17 for coupling a bearing 15 of the position passing the shaft 7 through a wall 13 of the vessel 1 to the pump 9. For example, the shaft 7 from the motor 5 coupled to the fan 3 of the blower has mechanical seals 19 at both sides through the wall 13, and a bearing 15 is projected from the wall 13 into the inside of the vessel 1, an exhaust chamber 21 is provided around the space between the shaft 7 at the intermediate of the seals 19 of both sides, and the conduit 17 to the pump 9 is opened with the chamber 21. |
