发明名称 SHARP TEMPERATURE GRADIENT TYPE MELTING AND SOLIDIFYING APPARATUS
摘要 PURPOSE:To form a high-quality semicondutor crystal having a uniform composition in the titled melting and solidifying apparatus by installing the temp. gradient section composed of a water-cooled jacket and a brush part having a whiskers made of a heat conductor in a movable state relative to a product to be treated. CONSTITUTION:A melting chamber 2, a temp. gradient section 3, etc. are arranged in a melting and solidifying apparatus 1, and the section 3 is composed of a water-cooled jacket 3a and a brush part 3b having many implanted fine whiskers made of a heat conductor. A product to be treated is fixed in the apparatus 1, and a screw section 7 is rotated with a driving section 10. By the rotation the chamber 2, the section 3, etc. supported on a support stand 6 are combinedly moved to the left, so the main part of the product 5 is positioned in the chamber 2 and heated. The stand 6 is then moved to the right at a prescribed speed, and the heated part is rapidly cooled in the section 3 to provide a sharp temp. gradient to the cooled part 5a in the longitudinal direction.
申请公布号 JPS5997590(A) 申请公布日期 1984.06.05
申请号 JP19820206893 申请日期 1982.11.27
申请人 NIPPON DENSHIN DENWA KOSHA;ISHIKAWAJIMA HARIMA JUKOGYO KK 发明人 KINOSHITA KIYOUICHI;SUGII KIYOMASA;ENDOU SUKEHARU
分类号 C30B29/46;C30B11/00;H01L21/368 主分类号 C30B29/46
代理机构 代理人
主权项
地址