发明名称 Ion source
摘要 A reservoir, extracting electrode and circular tungsten filament are maintained at high positive D.C. potential relative to a grounded electrode. Thermal electrons emanated from the filament irradiates and heats the bottom of the reservoir. As a result, powdered CsI held in the reservoir is melted and then forms a liquid CsI cone-shaped portion below the capillary formed at the reservoir bottom. Vaporized CsI molecules are created by further heating the cone-shaped portion, and are ionized by electron beam irradiation, so that a Cs+ ion beam is obtained.
申请公布号 US4453078(A) 申请公布日期 1984.06.05
申请号 US19820385940 申请日期 1982.06.07
申请人 JEOL LTD. 发明人 SHIMIZU, RYUICHI
分类号 H01J27/22;H01J27/26;H01J37/08;(IPC1-7):H01J27/22 主分类号 H01J27/22
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