Beam alignment tool and method

摘要

A method and apparatus for adjusting the alignment of a beam of radiant energy relative to a structure. A target is placed in the path of the beam, with an opaque reticle disposed in front of the target in the path of the beam in predetermined alignment with the structure. The beam impinges on the target to form a beam image and the reticle casts a shadow within the beam image. The positional relationship between the shadow and the outline of the beam image will be altered by any misalignment between the beam and the structure. The target is preferably chosen so that it will be permanently altered by the radiant energy of the beam, and the positional relationship between the shadow and the outline is preferably observed after exposure of the target to the beam.