发明名称 Scanning-image forming apparatus using photo response signal
摘要 A scanning-image forming apparatus using a photo-response signal according to this invention is constructed so that the photo-response signal obtained by scanning the surface of a semiconductor specimen with a photon beam is subjected to a 2nd differentiation, and that an image is displayed by employing the 2nd derivative of the photo-response signal as a modulation signal.
申请公布号 US4453181(A) 申请公布日期 1984.06.05
申请号 US19810311889 申请日期 1981.10.15
申请人 HITACHI, LTD. 发明人 MUNAKATA, CHUSUKE;KOHNO, HIDEKI
分类号 G01R31/26;G01R31/265;G01R31/308;H01L21/66;H01L31/02;H04N1/409;(IPC1-7):H04N7/18 主分类号 G01R31/26
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