发明名称 |
Scanning-image forming apparatus using photo response signal |
摘要 |
A scanning-image forming apparatus using a photo-response signal according to this invention is constructed so that the photo-response signal obtained by scanning the surface of a semiconductor specimen with a photon beam is subjected to a 2nd differentiation, and that an image is displayed by employing the 2nd derivative of the photo-response signal as a modulation signal.
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申请公布号 |
US4453181(A) |
申请公布日期 |
1984.06.05 |
申请号 |
US19810311889 |
申请日期 |
1981.10.15 |
申请人 |
HITACHI, LTD. |
发明人 |
MUNAKATA, CHUSUKE;KOHNO, HIDEKI |
分类号 |
G01R31/26;G01R31/265;G01R31/308;H01L21/66;H01L31/02;H04N1/409;(IPC1-7):H04N7/18 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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