| 摘要 |
PURPOSE:To simply and certainly prevent the generation of contamination on the surface of a specimen caused by the gas generated when an X-ray generating means is heated, by arranging a cover for covering an X-ray generating means in a specimen chamber so that the open end thereof is located close to a vacuum pump. CONSTITUTION:The cover member 16 of an X-ray generating means 9 is provided in a specimen chamber 2 and the opening end 6 of said member 16 is positioned in close vicinity to the vacuum pump 11. Because X-rays are radiated by this simple constitution, the gas generated from the filament of the means 9 when said filament is heated is sucked by the pump 11 and is not diffused into the specimen chamber 2 and a specimen 4 is simply and certainly prevented from contamination. |
