发明名称 Semiconductive device and method of fabricating the same
摘要 1,139,746. Diodes. PHILCO-FORD CORP. 22 June, 1966 [22 June, 1965], No. 27886/66. Heading H1K. The PN junction of a tunnel diode lies between a mesa of one conductivity type and a smaller mesa of the opposite type. A typical device is made in multiple by coating one face of an N-type germanium wafer with aluminium, reducing this to a series of dots by etching, cutting into individual units and then flash alloying the aluminium to the germanium. After thermocompression bonding a gold wire to the aluminium residue the device is electrolytically etched in potassium hydroxide to undercut the bond and form a mesa. Subsequently the device is re-etched in oxalic acid, preferably mixed with hydrogen peroxide and a wetting agent, to preferentially remove the aluminium-alloyed region to form the second mesa of smaller cross section. The completed device is then mounted in a ceramic tube between metal end plugs.
申请公布号 US3374405(A) 申请公布日期 1968.03.19
申请号 US19650466008 申请日期 1965.06.22
申请人 PHILCO-FORD CORPORATION 发明人 DAVIS MITCHELL;SOWERS MINERVA L.
分类号 H01L21/00;H01L21/24;H01L29/00;H01L29/88 主分类号 H01L21/00
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