WERKWIJZE VOOR HET OP EEN DRAGERLICHAAM VORMEN VAN EEN VERBINDINGSPATROON, DAT TEN MINSTE TWEE BOVEN ELKAAR LIGGENDE, ELEKTRISCH GEISOLEERDE GELEIDERPATRONEN OMVAT.

摘要

At least two overlapping or crossing levels of electrically isolated conductors are used to interconnect regions of a microelectronic device. To minimize shorts at regions of overlap or crossing, the lower conductor is provided with a pronouncedly trapezoidal cross section to facilitate maintenance of a uniform thickness of insulation between the two conductors. To achieve this cross section, the lower conductor is made of a material which etches slower in the thickness direction than in the direction normal thereto. Typically the lower conductor may be a binary metal alloy whose composition varies with thickness or polycrystalline silicon whose doping or crystalline disorder varies with thickness.