| 摘要 |
PURPOSE:To inhibit the formation of an air or nitrogen layer between a photomask and a substrate and to separate easily the photomask from the substrate by piercing a through-hole in the photomask in the thickness direction. CONSTITUTION:A through-hole 6 of 10-50mumphi is pierced in a photomask 1 at an arbitrary position such as the position of a scribed line. When the photomask 1 is brought into contact with a substrate 2, air or nitrogen 5 present between the photomask 1 and the substrate 2 is vented from the hole 6, and the photomask 1 contacts perfectly the substrate 2. When the photomask 1 is separated from the substrate 2 after exposure, air or nitrogen penetrates from the hole 6, so the photomask 1 can be easily separated from the substrate 2. |
