发明名称 ULTRAVIOLET PURIFIER
摘要 PURPOSE:To decompose and purify organic contaminations or the like efficiently and at high speed, by selecting the output of a lamp and the positional relationship between the lamp and a substance to be purified so as to specify the radiation intensity of ultraviolet rays of wavelength 185nm. CONSTITUTION:In an ultraviolet purifier, the output of a lamp and the positional relationship between the lamp and a substance to be purified, etc. are selected so that the radiation intensity of ultraviolet rays of wavelength 185nm on the surface of the substance to be purified or at the intermediate point in the direction of the transmission of rays of a fluid substance to be purified is 3mw/cm<2> or above. In a box-shaped main body 1 a belt conveyor 2 is stretched, and a low-voltage mercury-vapor lamp serving as the ultraviolet lamp 4 is set above said conveyor 2. The substance 5 to be purified, which is put on the conveyor 2 at an inlet 1a, is advanced while being purified by the lamp 4 apart by a distance L therefrom. The purification is completed when the substance is passed completely under the lamp 4, and the substance is taken out from an outlet 1b. A suction fan 6 is provided under the main body 1, and thereby cooling air and ozone and further decomposed gaseous contaminations, etc. are discharged.
申请公布号 JPS5994824(A) 申请公布日期 1984.05.31
申请号 JP19820204572 申请日期 1982.11.24
申请人 USHIO DENKI KK 发明人 HIRAMOTO TATSUMI;ARAKAWA MITSUO;TANAKA KAZUYA
分类号 B05D1/40;H01L21/027;H01L21/30;H01L21/304 主分类号 B05D1/40
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