| 摘要 |
PURPOSE:To enable to perform a stabilized ball formation making use of a wire which is easily oxidized when a ballup is performed by a method wherein, at the tip of the metal thin wire to be led out from a capillary, the first means with which nitrogen or inert gas will be supplied is provided in the vicinity of the part which will be turned to ball-like form by electric discharge and the second means which supplies nitrogen or inert gas is provided on the circumference. CONSTITUTION:The wire bonding device consists of a nozzle 8, which is formed in such a manner that the direction of nitrogen or inert gas stream and the direction of electric discharge by an electric torch will be made in parallel with each other, and a nozzle 9 with which said nozzle 8 is surrounded. As a gas stream in parallel with the direction of electric discharge can be formed by the nozzle 8 located directly above the position where the ball is formed, a stabilized ball formation can be performed. A protective atmosphere is formed around the nozzle 8 located in the center by the nozzle 9, and this makes the atmosphere at the ball forming position more completely than the case where the nozzle 8 is independently present. As a vertical movement is performed too fast with the nozzle 8 only, the diffusion of oxygen in the air can not be prevented completely. Therefore, the nozzle 9 is provided and the completeness of atmosphere is increased by doubly protecting the ball formation position. |
