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发明名称
RASTER-TUNNELMIKROSKOP.
摘要
申请公布号
CH643397(A5)
申请公布日期
1984.05.30
申请号
CH19790008486
申请日期
1979.09.20
申请人
INTERNATIONAL BUSINESS MACHINES CORP.
发明人
GERD BINNIG;HEINRICH ROHRER
分类号
G01B7/34;G01N23/00;G01N27/00;G01N27/62;G01Q30/04;G01Q30/16;G01Q30/18;G01Q30/20;G01Q60/10;G01Q60/16;H01J37/28;H01L41/09;(IPC1-7):01J37/285;01B7/34;01N27/62
主分类号
G01B7/34
代理机构
代理人
主权项
地址
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