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发明名称
Appliance for coating surfaces by means of cathode sputtering
摘要
申请公布号
CH643303(A5)
申请公布日期
1984.05.30
申请号
CH19790011478
申请日期
1979.12.27
申请人
NIHON SHINKU GIJUTSU KK
发明人
CHIKARA HAYASHI
分类号
C23C14/34;C23C14/56;(IPC1-7):C23C15/00
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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