| 摘要 |
An electron beam control device for electron microscopes is disclosed in which various digital signals used for deflecting an electron beam are previously stored in a memory for each observation mode. When one of the observation modes is specified by a selector, one of the digital signals corresponding to the specified observation mode is read out from the memory to a digital-to-analog converter and is thereby converted into an analog signal. The analog signal is supplied to electron beam deflectors to control the beam alignment.
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