发明名称 Large scale integrated focal plane
摘要 A photo-electric sensor comprised of a wafer of semiconductor material with a first plurality of photodetectors integral with its rear surface, its front surface being an electrode comprised of a transparent layer of electrically conductive material, has those detectors so spaced apart from each other that the total array can be sampled by a second plurality of charge coupled device multiplexers, each of which multiplexers has its input terminals spaced closer together than are the photodetectors. Each multiplexer input terminal is mechanically and electrically coupled to a photodetector through metallic leads and columns, such leads and columns being so configured as to preclude obtrusion of multiplexer structure into space outside the wafer's lateral extremities, which results in no "dead" space in a focal plane consisting of either one sensor or a plurality thereof abutting each other.
申请公布号 US4451842(A) 申请公布日期 1984.05.29
申请号 US19800220676 申请日期 1980.12.29
申请人 ROCKWELL INTERNATIONAL CORPORATION 发明人 POMMERRENIG, DIETER H.
分类号 H01L27/148;H01L31/0224;H01L31/0232;(IPC1-7):H01L27/14;H01L29/78;H01L23/48;H01L25/04 主分类号 H01L27/148
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