| 摘要 |
<p>PURPOSE:To obtain a volumetric capacity changeable type humidity sensor high in a response speed and having a hardly contaminated surface, by laminating a humidity non-sensitive layer comprising org. macromolecular substance, a porous humidity sensitive resin layer and a porous electrode on a substrate side electrode in said order. CONSTITUTION:Stainless steel is used as a substrate side electrode 1 and a humidity non-sensitive layer 2 comprising saturated polyester resin is formed on the electrode 1 in a thickness of about 20mum. In the next step, a dielectric ceramic powder, for example, a BaTiO3 powder is added to water absorbable resin containing a COOH-group or a OH-group such as polyester resin, polyamide resin or cellulose having air bubbles dispersed therein or a foaming agent contained therein and the resulting mixture is applied onto the humidity non- sensitive resin layer 2 and baked to form a humidity sensitive layer 3. Subsequently, a porous electrode 4 is formed on said layer 3 by vapor deposition of Au to obtain a capacity type humidity sensor. By this method, defects such that short-circuit is generated by moisture reaching the electrode 1 and the dehydration of moisture deeply penetrated into the sensor is delayed are eliminated.</p> |
