发明名称 PELLET MOUNTING APPARATUS
摘要 PURPOSE:To eliminate a gaging apparatus which has been required and preliminarily prevent damage of pellet by comprising the axial direction movement mechanism which moves an attracting tool vertically and the lateral direction movement mechanism which moves it laterally and by also providing a rotating mechanism which drivingly rotates it around the axis. CONSTITUTION:Levers 49, 51, rod 33, cams 55, 56 and cam followers 52, 53 form the lateral direction movement mechanism which moves an attracting tool 26 laterally. Levers 40, 41, rod 43, cams 59, 60 for driving said levers, axis 39, arm 45 and hollow axis 27 form the longitudinal direction movement mechanism which moves the attracting tool 26 in the axial direction. A pulse motor 36, sleeve 48 and hollow axis 27 form a rotating mechanism for driving and thereby the pellet is attracted or released by the attracting tool 26 with a negative pressure adequately generated within the hollow axis 27 through a vacuum evacuating tube.
申请公布号 JPS5990932(A) 申请公布日期 1984.05.25
申请号 JP19820199766 申请日期 1982.11.16
申请人 TOSHIBA KK 发明人 KUSAKARI TERUO
分类号 H01L21/52;H01L21/58;(IPC1-7):01L21/58 主分类号 H01L21/52
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