CHARGED PARTICLE BEAM LITHOGRAPHIC DEVICE ASSOCIATED WITH LOCAL VACUUM ENVELOPE,申请号JP19830194493-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	CHARGED PARTICLE BEAM LITHOGRAPHIC DEVICE ASSOCIATED WITH LOCAL VACUUM ENVELOPE
摘要
申请公布号	JPS5990926(A)	申请公布日期	1984.05.25
申请号	JP19830194493	申请日期	1983.10.19
申请人	VARIAN ASSOC	发明人	POORU EFU PETORITSUKU
分类号	H01J37/305;H01J37/301;H01J37/317;H01L21/027	主分类号	H01J37/305
代理机构		代理人
主权项
地址

您可能感兴趣的专利

Process for synthesis of lower isoparaffins from synthesis gas

Composition for prophylaxis and/or treatment of dry eye syndrome comprising vitamin D

Apparatus and process for removing fine impurities from a fibrous suspension

Coating method for cylindrical base member

Functionalized silicon compounds and methods for their synthesis and use

Oscillator circuit with reduced capacity for AC coupling capacitor

Optical amplifier for amplifying light in a long wavelength band

Array lens, lighting optical system, optical unit and imaging apparatus

Transparent touch panel and liquid crystal display device equipped with transparent touch panel

Portable computer and system having an alignment mechanism

Ultra-fast tunable optical filters

Network hub for interconnecting a wireless office environment with a public cellular telephone network

Image coding and decoding methods, image coding and decoding apparatuses, and recording media for image coding and decoding programs

Position based personal digital assistant

Data split parallel shifter and parallel adder/subtractor

System and method for provisioning assistance global positioning system information to a mobile station

Managing recovery of data after failure of one or more caches

HYBRID POLYMERIC ELECTROLYTE AND NON-AQUEOUS ELECTROCHEMICALDEVICE COMPRISING THE SAME

INFORMATION PROCESSING SYSTEM AND TRUE/FALSE DETERMINING METHOD USED THEREFOR