发明名称 DEVICE FOR PREVENTING VAPOR DEPOSITION ON REAR SURFACE
摘要 PURPOSE:To prevent an evaporating metal from spreading to the non-plating surface of a metallic plate which is plated on one side by providing a sealing plate which rotates in the transverse direction of the metallic plate by means of a hinge in a vapor deposition device and bending the top end of the sealing plate in the direction of the metallic plate. CONSTITUTION:A metallic plate 1 in a vapor deposition chamber travels over a vapor source 8 contg. a metal 9 for evaporation and is deposited by evaporation with the metal 9 on one surface thereof. A sealing plate 23 is mounted by means of a hinge 21 to a partition wall 10 so that the plate 23 can be freely rotated by means of the hinge 21 according to the lateral oscillatory movement of the traveling plate 1. A curved part 24 is provided to the top end of the plate 23. The flow direction of the vapor flow 26 leaking in the clearance 27 between the plate 23 and the plate 1 is thus turned by the part 24 to the main vapor flow 25 side facing to the plate 1, whereby the vapor flow leaking through the clearance 27 is eliminated and the spreading of the vapor to the rear side is prevented.
申请公布号 JPS5989766(A) 申请公布日期 1984.05.24
申请号 JP19820199668 申请日期 1982.11.16
申请人 MITSUBISHI JUKOGYO KK 发明人 ITANO SHIGEO;WADA TETSUYOSHI;FURUKAWA HEIZABUROU;WAKE KANJI
分类号 C23C14/24;C23C14/56 主分类号 C23C14/24
代理机构 代理人
主权项
地址