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经营范围
发明名称
Etching mechanism
摘要
申请公布号
US3406697(A)
申请公布日期
1968.10.22
申请号
US19660531716
申请日期
1966.03.04
申请人
WESTERN TECHNOLOGY, INC.
发明人
MITCHELL ERNEST H.;MUELLER ALVIN E.
分类号
C23F1/08
主分类号
C23F1/08
代理机构
代理人
主权项
地址
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