发明名称 CONDUCTIVE LAYERS ON SEMICONDUCTOR DEVICES
摘要 A method for manufacturing a semiconductor device that includes p- and n-type regions formed on an insulating substrate, and an interconnection layer electrically coupled with these p- and n-type regions. The interconnection layer is an n-type polycrystalline silicon layer which is electrically coupled with the p- and n-type regions through a metal silicide film formed between the interconnection layer and the p- and n-type regions.
申请公布号 GB2083282(B) 申请公布日期 1984.05.23
申请号 GB19810021282 申请日期 1981.07.10
申请人 TOKYO SHIBAURA DENKI KK 发明人
分类号 H01L21/768;H01L21/28;H01L23/532;H01L27/12;H01L29/43;(IPC1-7):01L21/44 主分类号 H01L21/768
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