发明名称 High voltage semiconductor devices with reduced on-resistance.
摘要 <p>A high voltage P-N diode includes a P&lt;-&gt; substrate with a thin N&lt;-&gt; epitaxial layer thereon. An N&lt;+&gt; cathode region extends into the N&lt;-&gt; epitaxial layer from the upper surface thereof. A P&lt;+&gt; anode region extends into the N&lt;-&gt; epitaxial layer from its upper surface and surrounds the N&lt;+&gt; cathode region. An N&lt;+&gt; buried layer is situated between the P&lt;-&gt; substrate and the N&lt;-&gt; epitaxial layer, beneath the P&lt;+&gt; anode region, and surrounds the N&lt;+&gt; cathode region, as viewed from above. A further P&lt;+&gt; region extends into the N&lt;-&gt; epitaxial layer from its upper surface and surrounds the N&lt;+&gt; cathode region, and, in turn, is surrounded by the P&lt;+&gt; anode region. In an exemplary embodiment, a MOSFET is included to alternately connect the further P&lt;+&gt; region to the P&lt;-&gt; substrate and to open circuit the further P&lt;+&gt; region. With the further P&lt;+&gt; region open circuited, the P-N diode has a low on-resistance when it operates in its current-conducting state. An embodiment structurally similar to the P-N diode comprises a bipolar transistor having an N&lt;+&gt; emitter region extending into a P&lt;+&gt; base region, which corresponds to the P&lt;+&gt; anode region of the diode.</p>
申请公布号 EP0108945(A1) 申请公布日期 1984.05.23
申请号 EP19830110354 申请日期 1983.10.18
申请人 GENERAL ELECTRIC COMPANY 发明人 BALIGA, BANTVAL JAYANT;WILDI, ERIC JOSEPH
分类号 H01L21/822;H01L21/761;H01L27/04;H01L27/06;H01L27/07;H01L29/10;H01L29/868;(IPC1-7):01L29/90;01L27/08;01L27/06;01L21/76 主分类号 H01L21/822
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