发明名称 PICK-UP DEVICE
摘要 PURPOSE:To securely exfoliate also a large diameter pellet from an adhesive sheet by a method wherein the adhesive sheet is exfoliated by thrusting a needle, after adhesion force between the pellet is weakened by pushing up the adhesive sheet by means of a compression spring via an auxiliary member. CONSTITUTION:When division into the pellets 13 is performed, and the adhesive sheet 11 is stretched and supplied to a device, a camera 9 recognizes the pellets 13 except those with marks 14 and then makes them position immediately above an eliminator 1. At the same time, a cam 3 operates and a rod 2 rises, then the upper end of the auxiliary member 8 abuts against the lower end of the adhesive sheet 11. When it further rises, the spring 7 is compressed and pushes up the sheet 11 via the member 8. Thereby, exfoliation generates outside the member 8. After the further rise of the rod 2, the needles 4 rise, penetrate the sheet 11, thrust the pellets 13, and exfoliate them, while the pellets are adsorption-held by a collet 10 and carried. Thereafter, the device returns to its original state in reverse order. This constitution enables to securely pick up objects from the adhesive sheet.
申请公布号 JPS5988844(A) 申请公布日期 1984.05.22
申请号 JP19820197598 申请日期 1982.11.12
申请人 HITACHI OUME DENSHI KK;HITACHI SEISAKUSHO KK 发明人 ARASHIMA TERUO
分类号 H01L21/67;H01L21/00;H01L21/68;(IPC1-7):01L21/68 主分类号 H01L21/67
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