| 摘要 |
PURPOSE:To enable an accurate flow rate control by preventing bouncing of a valve body at the time of the solenoid valve closure by attaching a mass body through a resilient member in a reciprocally movable manner in the direction of displacement to a movable member which is displaced by a solenoid. CONSTITUTION:In a normally opened solenoid valve 35, when a coil 14 of a solenoid 11 is electrified to close the valve, the main magnetic pole 25 is energized to cause a movable member 22 drawn downward so as for a valve body 30 to be seated on a valve seat 21. At this time, when the magnetic force acting upon a flange 26 of the movable member 22 due to starting electrifying exceeds the spring force of a spring 31 (time t1), the movable member 22 is displaced downward, and a balancer 41 starts being displaced by springs 39, 40 with a specified phase delay. After time t2 is elapsed and the relative displacement between the movable member 22 and the balancer 41 reaches to a specified value to cause the balancer to come into contact with a stopper 37, a negative momentum acts upon the movable member 22 to prevent the occurrence of bouncing. |
