摘要 |
PURPOSE:To enable to stably and inexpensively perform an airtight seal of high quality by sealing between a metal layer formed at the hole end of a ceramic substrate and a glass cap through a metal solder. CONSTITUTION:Metal base which is formed, for example, Ag, Au, Ag-Pd, Ag-Pt, Au-Pd or Au-Pt is coated on the sealing surface of a ceramic substrate 1 and baked to form a metal layer 13 having airtightness. A glass cap 11 is placed through a metal solder 14, heated to press-bond between the cap 11 and the substrate 1, and the solder 14 is crushed and bonded. When the solder 14 employs the material which has a melting point of approx. 240 deg.C or lower, the thermal loss of a gelatine filter is suppressed to stabilize the quality. |